!This script has been used in the software for the Micropyros project ! http://www.imtek.uni-freiburg.de/simulation/pyros/ !************************************************************************* !* * !* Tamara Bechtold * !* March 2003 * !************************************************************************* !This file performs a thermal transient (only heating up) analisys of a 3D !microthruster model (igniter and chamberwafer only). !Possibility to use the fine mapped mesh within the !heater, heat area of the membrane and a fuel and the coarse mapped mesh for !the big volumes around (igniter substrate, chamber etc.)is given. For a thin !"belt" between the two, the free mesh can be used. !In this file a mapped meshing with a fixed ESIZE (ESIZE of 100µm) is used, !because no big difference was observed to the mixed meshing (see Micropyros !report from 21.02.03) !The geometry consists out of igniter wafer, air gap wafer,chamber wafer !and seal wafer as well as a thermal glue layer between each two wafers !Dimension from the center to the outer simulations edge, lchip lchip=0.001 !Thickness of the igniter substrate, tchip tchip=0.00035 !Thickness of tank substrate, ttank ttank=0.001 !Thickness of seal, tseal tseal=0.0005 !Thickness of the air gap wafer, tair tair=0.00035 !Thickness of thermal glue between wafer parts, tglue tglue=0.0001 !Dimension from the center to the free membrane edge, lmembrane lmembrane=0.00075 !Thickness of SiO2 layer, tSiO2m tSiO2m=1.4e-6 !Thickness of SiNx layer, tSiNxm tSiNxm=6.e-7 !Thickness of heater, theat theat=5.e-7 !Witdh of spiral heater, wheat wheat=0.00005 !Dimension from the center to the edge of heating area, heatarea heatarea=0.000225 ! !Element Type: 1 for high-order, 0 for low-oder elem=0 ! !Silicon D1=2328 C1=702 K1=100 !SiO2 D2=2270 C2=1000 K2=1.4 !SiNx D3=2270 C3=1000 K3=49 !Polisilicon D4=3280 C4=700 K4=100 !Fuel D5=1526 C5=1852 K5=0.25 !Material2 D6=2370 C6=880 K6=1.35 !Air D7=1.239 C7=1000 K7=0.025 !Glue D8=1380 C8=1000 K8=1.4 ! !Material number for the SiO2 membrane SiO2membrane=2 !Material number for the SiNx membrane SiNxmembrane=3 !Material number for the resistor meander=4 !Material number for the igniter wafer substrate IgniterSubstrate=1 !Material number for the igniter fuel IgniterFuel=5 !Material number for the thermal glue ThermalGlue=8 !Material number for the chamber fuel ChamberFuel=5 !Material number for the air gap AirGap=7 !Material number for the substrate of the air gap wafer AirGapSubstrate=1 !Material number for the chamber wafer ChamberWafer=6 !Material number for the seal wafer SealWafer=6 !Bottom B1=2 B11=0 B12=0 !Top B2=0 B21=0 B22=0 !Right side B3=0 B31=0 B32=0 !Left side B4=0 B41=0 B42=0 !Front side B5=0 B51=0 B52=0 !Back side B6=0 B61=0 B62=0 ! !Applied electric power in W power=0.15 /VUP,ALL,Z /TRLCY,VOLU,0.5 /PREP7 /VIEW, 1 ,1,2,3 !Oblique view /TRIAD,LBOT !Axes in the bottom left /NUMBER,1 !Numbering shown with colors only /PNUM,MAT,1 !Atribut numbering are the material numbers /COLOR,NUM,DGRA,1 /COLOR,NUM,YELL,2 /COLOR,NUM,RED,3 /COLOR,NUM,GREE,4 /COLOR,NUM,ORAN,5 /COLOR,NUM,BMAG,6 /COLOR,NUM,BLAC,7 /COLOR,NUM,BLUE,8 /COLOR,NUM,YGRE,9 /COLOR,NUM,BLUE,10 /COLOR,NUM,GCYA,11 *IF,elem,EQ,0,THEN ET,1,SOLID70 ! 3D Thermal solid - low order element *ELSE ET,1,SOLID90 ! 3D Thermal solid - high order element *ENDIF ! Materialparameter MP,DENS,1,D1 MP,C, 1,C1 MP,KXX, 1,K1 !MP,RSVX,1,R1 MP,DENS,2,D2 MP,C, 2,C2 MP,KXX, 2,K2 !MP,RSVX,2,R2 MP,DENS,3,D3 MP,C, 3,C3 MP,KXX, 3,K3 !MP,RSVX,3,R3 MP,DENS,4,D4 MP,C, 4,C4 MP,KXX, 4,K4 !MP,RSVX,4,R4 MP,DENS,5,D5 MP,C, 5,C5 MP,KXX, 5,K5 !MP,RSVX,5,R5 MP,DENS,6,D6 MP,C, 6,C6 MP,KXX, 6,K6 !MP,RSVX,6,R6 MP,DENS,7,D7 MP,C, 7,C7 MP,KXX, 7,K7 !MP,RSVX,7,R7 ! Materialparameter for the thermal glue (probably PvC or similar) MP,DENS,8,D8 MP,C, 8,C8 MP,KXX, 8,K8 tmemb = tSiO2m+tSiNxm !Definition of volumina !Igniter wafer BLOCK,-lchip, lchip,-lchip,lchip,-tchip,0 !1.cube-chip-block BLOCK,-lmembrane, lmembrane,-lmembrane,lmembrane,-tchip,0 !2.igniters fuel !first layer of glue upperlevel= -tchip lowerlevel=-(tchip+tglue) BLOCK,-lchip, lchip,-lchip,lchip,upperlevel,lowerlevel ! BLOCK,-lmembrane, lmembrane,-lmembrane,lmembrane,upperlevel,lowerlevel ! !air gap wafer upperlevel= -(tchip+tglue) lowerlevel= -(tchip+tglue+tair) BLOCK,-lchip, lchip,-lchip,lchip,upperlevel,lowerlevel ! BLOCK,-lmembrane, lmembrane,-lmembrane,lmembrane,upperlevel,lowerlevel ! !second layer of glue upperlevel=-(tchip+ tglue+tair) lowerlevel=-(tchip+2*tglue+tair) BLOCK,-lchip, lchip,-lchip,lchip,upperlevel,lowerlevel ! BLOCK,-lmembrane, lmembrane,-lmembrane,lmembrane,upperlevel,lowerlevel ! !Chamber wafer & fuel upperlevel=-(tchip+2*tglue+tair) lowerlevel=-(tchip+2*tglue+tair+ttank) BLOCK,-lchip, lchip,-lchip,lchip,upperlevel,lowerlevel ! BLOCK,-lmembrane, lmembrane,-lmembrane,lmembrane,upperlevel,lowerlevel ! !third layer of glue upperlevel=-(tchip+2*tglue+tair+ttank) lowerlevel=-(tchip+3*tglue+tair+ttank) BLOCK,-lchip, lchip,-lchip,lchip,upperlevel,lowerlevel ! BLOCK,-lmembrane, lmembrane,-lmembrane,lmembrane,upperlevel,lowerlevel ! !Seal wafer upperlevel=-(tchip+3*tglue+tair+ttank) lowerlevel=-(tchip+3*tglue+tair+ttank+tseal) BLOCK,-lchip, lchip,-lchip,lchip,upperlevel,lowerlevel ! !Membrane BLOCK,-lchip,lchip,-lchip,lchip,0,tSiO2m !SiO2membrane-layer BLOCK,-lchip,lchip,-lchip,lchip,tSiO2m,tmemb !SiNx membrane-layer !Heater BLOCK,-heatarea,heatarea,-heatarea,heatarea,tmemb,tmemb+theat !mask for the heater, from which the volums will be subtracted VSEL,S,LOC,Z,tmemb,tmemb+theat CM,temp1,VOLU !the component will be named temp1 BLOCK,-heatarea,-heatarea+wheat,-heatarea+wheat,heatarea,tmemb,tmemb+theat!9.protective-layer(1.part) BLOCK,-heatarea+2*wheat,-heatarea+3*wheat,-heatarea,heatarea-wheat,tmemb,tmemb+theat!10.protective-layer(2.part) BLOCK,-wheat/2,wheat/2,-heatarea+wheat,heatarea,tmemb,tmemb+theat!11.protective-layer(3.part) BLOCK,heatarea-3*wheat,heatarea-2*wheat,-heatarea,heatarea-wheat,tmemb,tmemb+theat!12.protective-layer(4.part) BLOCK,heatarea-wheat,heatarea,-heatarea+wheat,heatarea,tmemb,tmemb+theat!13.protective-layer(5.part) VSEL,S,LOC,Z,tmemb,tmemb+theat CMSEL,U,temp1 !unselect the entity temp1 CM,temp2,VOLU !the protective layer parts to be substructed will be calledtemp2 CMSEL,S,temp1 CMSEL,A,temp2 VSBV,temp1,temp2,,DELE,DELE !what is left is the heater volume VSEL,S,LOC,Z,tmemb,tmemb+theat CM,heater,VOLU /SHOW,JPEG JPEG,ORIENT,HORIZ /GFILE,300, /RGB,INDEX,100,100,100,0 /RGB,INDEX,0,0,0,15 VSEL,ALL VOVLAP,ALL !no gluing is needed !VPLOT,ALL !Preparation for mapped meshing WPCSYS,-1,0 ! resets the working plane back to the global cartesian origin WPOFFS,0,lmembrane,0 ! WPROTA, THXY, THYZ, THZX ? Rotates the working plane around z,x and y axes respectively WPROTA,0,90,0 VSEL,ALL VSBW,ALL,,DELE!cuts all selected volumes by the working plane,volumes willbeglued, the old volums will be deleted WPOFFS,0,0,2*lmembrane VSEL,ALL VSBW,ALL,,DELE WPCSYS,-1,0 WPOFFS,lmembrane,0,0 WPROTA,0,0,90 VSEL,ALL VSBW,ALL,,DELE WPOFFS,0,0,-2*lmembrane VSEL,ALL VSBW,ALL,,DELE !cutting through the heater in y-direction WPCSYS,-1,0 WPOFFS,-4.5*wheat,0,0 WPROTA,0,0,90 *DO,k,1,10 VSEL,ALL VSBW,ALL,,DELE WPOFFS,0,0,wheat *ENDDO !cutting through the heater in x-direction WPCSYS,-1,0 WPOFFS,0,-4.5*wheat,0 WPROTA,0,90,0 VSEL,ALL VSBW,ALL,,DELE WPOFFS,0,0,-wheat VSEL,ALL VSBW,ALL,,DELE WPOFFS,0,0,-7*wheat VSEL,ALL VSBW,ALL,,DELE WPOFFS,0,0,-wheat VSEL,ALL VSBW,ALL,,DELE WPCSYS,-1,0 !Creation of entities !The material number will be set through VATT command ! define group of volumes belonging to the heater VSEL,S,LOC,Z,tmemb,tmemb+theat VATT,meander,1,1 CM,heater,VOLU ! define group of volumes belonging to the SiNx membrane VSEL,S,LOC,Z,tSiO2m,tmemb VATT,SiNxmembrane,1,1 CM,SiNxm,VOLU ! define group of volumes belonging to the SiO2 membrane VSEL,S,LOC,Z,0,tSiO2m VATT,SiO2membrane,1,1 CM,SiO2m,VOLU ! define group of volumes belonging to the igniter fuel VSEL,S,LOC,Z,0,-tchip VSEL,R,LOC,X,-lmembrane,lmembrane VSEL,R,LOC,Y,-lmembrane,lmembrane VATT,IgniterFuel,1,1 CM,igniterfuel,VOLU ! define group of volumes belonging to the igniter substrate VSEL,S,LOC,Z,0,-tchip CMSEL,U,igniterfuel VATT,IgniterSubstrate,1,1 CM,igniterchip,VOLU ! define group of volumes belonging to the thermal glue VSEL,S,LOC,X,-lmembrane,lmembrane VSEL,R,LOC,Y,-lmembrane,lmembrane CM,temp,VOLU VSEL,A,LOC,Z,-tchip,-(tchip+tglue) VSEL,A,LOC,Z,-(tchip+tglue+tair),-(tchip+2*tglue+tair) CMSEL,U,temp VSEL,A,LOC,Z,-(tchip+2*tglue+tair+ttank),-(tchip+3*tglue+tair+ttank) VATT,ThermalGlue,1,1 CM,glue,VOLU ! define group of volumes belonging to the chamber fuel VSEL,S,LOC,Z,-(tchip+2*tglue+tair),-(tchip+2*tglue+tair+ttank) VSEL,R,LOC,X,-lmembrane,lmembrane VSEL,R,LOC,Y,-lmembrane,lmembrane VATT,ChamberFuel,1,1 CM,chamberfuel,VOLU ! define group of volumes belonging to the air gap VSEL,S,LOC,Z,-tchip,-(tchip+2*tglue+tair) VSEL,R,LOC,X,-lmembrane,lmembrane VSEL,R,LOC,Y,-lmembrane,lmembrane VATT,AirGap,1,1 CM,airgap,VOLU ! define group of volumes belonging to the substrate of the air gap wafer VSEL,S,LOC,Z,-(tchip+tglue),-(tchip+tglue+tair) CMSEL,U,airgap VATT,AirGapSubstrate,1,1 CM,airgapsubstrate,VOLU ! define group of volumes belonging to the chamber VSEL,S,LOC,Z,-(tchip+2*tglue+tair),-(tchip+2*tglue+tair+ttank) CMSEL,U,temp VATT,ChamberWafer,1,1 CM,chamber,VOLU ! define group of volumes belonging to the seal wafer VSEL,S,LOC,Z,-(tchip+3*tglue+tair+ttank),-(tchip+3*tglue+tair+ttank+tseal) VATT,SealWafer,1,1 CM,seal,VOLU WPCSYS,-1,0 ALLS !Meshing !MSHAPE,KEY,DIMENSION For elements that support multiple shapes, specifies !the element shape to be used for meshing !MSHKEY, KEY ? Specifies whether free meshing or mapped meshing should be used to mesh a model MSHKEY,1 !mapped mashing MSHAPE,0,3D !3D mashing with hexahedral elements !************************************************************************* !* * !* Mapped meshing for the hole domain * !* * !************************************************************************* !Definition of element size for mapped meshing ESIZE,100E-6 VSEL,ALL VMESH,ALL !************************************************************************* !* * !* Mixed meshing * !* * !************************************************************************* !Fine mapped meshing for the heater, heat area of the membrane and a fuel ESIZE,50E-6 VSEL,S,LOC,Z,-tchip,tmemb+theat VSEL,R,LOC,X,-heatarea,heatarea VSEL,R,LOC,Y,-heatarea,heatarea CM,mesh1,VOLU !VMESH,ALL !Coarse mapped meshing for the bigger outher domains ESIZE,200E-6 VSEL,S,LOC,Z,-(tchip+tglue),tmemb+theat VSEL,R,LOC,X,-lmembrane,lmembrane VSEL,R,LOC,Y,-lmembrane,lmembrane VSEL,INVE CM,mesh3,VOLU !VMESH,ALL !Free meshing for the thin belt between the both mapped meshed parts VSEL,ALL CMSEL,U,mesh1 CMSEL,U,mesh3 ESIZE,100E-6 MSHKEY,0 !Free mashing MSHAPE,1,3D !3D mashing with tetrahedral elements !VMESH,ALL !************************************************************************* !Ploting the elements /COLOR,OUTL,BLAC ALLSEL EPLOT,ALL nsel,s,loc,y,-lchip,0 esln,s /graphics,power /COLOR,OUTL,WHIT EPLOT,ALL !bottom *IF,B1,EQ,1,THEN ASEL,S,LOC,Z,-(tchip+3*tglue+tair+ttank+tseal) SFA,ALL,,HFLUX,B11 !Heat flux at the bottom of the chamber wafer *ENDIF *IF,B1,EQ,2,THEN ASEL,S,LOC,Z,-(tchip+3*tglue+tair+ttank+tseal) DA,ALL,TEMP,B11 !Dirichle BC at the bottom of the chamber wafer *ENDIF *IF,B1,EQ,3,THEN ASEL,S,LOC,Z,-(tchip+3*tglue+tair+ttank+tseal) SFA,ALL,,CONV,B11,B12 *ENDIF !top *IF,B2,EQ,1,THEN ASEL,S,LOC,Z,tmemb+theat SFA,ALL,,HFLUX,B21 *ENDIF *IF,B2,EQ,2,THEN ASEL,S,LOC,Z,tmemb+theat DA,ALL,TEMP,B21 *ENDIF *IF,B2,EQ,3,THEN ASEL,S,LOC,Z,tmemb+theat SFA,ALL,,CONV,B21,B22 *ENDIF !right side *IF,B3,EQ,1,THEN ASEL,S,LOC,Y,lchip SFA,ALL,,HFLUX,B31 *ENDIF *IF,B3,EQ,2,THEN ASEL,S,LOC,Y,lchip DA,ALL,,TEMP,B31 *ENDIF *IF,B3,EQ,3,THEN ASEL,S,LOC,Y,lchip SFA,ALL,,CONV,B31,B32 *ENDIF !left side *IF,B4,EQ,1,THEN ASEL,S,LOC,Y,-lchip SFA,ALL,,HFLUX,B41 *ENDIF *IF,B4,EQ,2,THEN ASEL,S,LOC,Y,-lchip DA,ALL,,TEMP,B41 *ENDIF *IF,B4,EQ,3,THEN ASEL,S,LOC,Y,-lchip SFA,ALL,,CONV,B41,B42 *ENDIF !front side *IF,B5,EQ,1,THEN ASEL,S,LOC,X,lchip SFA,ALL,,HFLUX,B51 *ENDIF *IF,B5,EQ,2,THEN ASEL,S,LOC,X,lchip DA,ALL,,TEMP,B51 *ENDIF *IF,B5,EQ,3,THEN ASEL,S,LOC,X,lchip SFA,ALL,,CONV,B51,B52 *ENDIF !back side *IF,B6,EQ,1,THEN ASEL,S,LOC,X,-lchip SFA,ALL,,HFLUX,B61 *ENDIF *IF,B6,EQ,2,THEN ASEL,S,LOC,X,-lchip DA,ALL,,TEMP,B61 *ENDIF *IF,B6,EQ,3,THEN ASEL,S,LOC,X,-lchip SFA,ALL,,CONV,B61,B62 *ENDIF !Heat generation rate to be applied as BFA on teh heater volum hgen = power/(theat*wheat*(5*wheat+4*2*heatarea)) !Heat source CMSEL,S,heater !heater volums BFV,ALL,HGEN,hgen *CFOPEN, output, txt n1 = NODE(0,0,0) n1name = 'FuelTop' *VWRITE,n1name,n1 (A20, F10.0) n2 = NODE(0,0,-0.0002) n2name = 'FT-200' *VWRITE,n2name,n2 (A20, F10.0) n3 = NODE(0,0,-0.0004) n3name = 'FT-400' *VWRITE,n3name,n3 (A20, F10.0) n4 = NODE(0,0,-0.0019) n4name ='FuelBot' *VWRITE,n4name,n4 (A20, F10.0) *CFCLOS nsel,s,,,n1 nsel,a,,,n2 nsel,a,,,n3 nsel,a,,,n4 cm,out,node allsel SAVE FINISH